1. Place enough water in the bottom of a 4-quart saucepan to come 1 inch up the sides. Bring to a simmer over medium heat.
2. Melt the semisweet chocolate chips(13 oz) with the coffee liqueur(1/3 cups) and vanilla extract(1 tsp) in a medium metal bowl set over the simmering water, stirring often with a silicone spatula. Combine the silken tofu(1 lb), chocolate mixture and honey(1 tbsp) in a blender or food processor and spin until smooth, about 1 minute. Pour the filling into the ramekins and refrigerate for 2 hours, or until the filling sets firm.
3. Preheat the oven to 350 degrees F.
4. Bake on the middle rack of the oven about 15 minutes. Remove from the oven and cool completely.